Number of the records: 1
On Angle Resolved RF Magnetron Sputtering of Ge-Sb-Te Material Doped by Si or Se
- 1.0327506 - ÚMCH 2010 US eng A - Abstract
Wágner, T. - Gutwirth, J. - Bezdička, Petr - Bartoš, M. - Kotulanová, Eva - Vlček, Milan - Orava, J. - Frumar, M.
On Angle Resolved RF Magnetron Sputtering of Ge-Sb-Te Material Doped by Si or Se.
Abstracts. San Francisco: Materials Research Society, 2008. G5.7.
[Spring Meeting MRS - Phase-Change Materials for Reconfigurable Electronics and Memory Applications. 24.03.2008-27.03.2008, San Francisco]
R&D Projects: GA MŠMT LC523; GA ČR GA203/06/1368
Institutional research plan: CEZ:AV0Z40310501; CEZ:AV0Z40500505
Keywords : thin films * magnetron sputtering
Subject RIV: CA - Inorganic Chemistry
http://www.mrs.org/s_mrs/doc.asp?DID=208849&CID=13713&SID=1&VID=2&RTID=0
Permanent Link: http://hdl.handle.net/11104/0174306
Number of the records: 1