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C-AFM and X-TEM: studies of mixed-phase silicon thin films

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    0308068 - FZÚ 2008 RIV DE eng J - Journal Article
    Mates, Tomáš - Fejfar, Antonín - Rezek, Bohuslav - Kočka, Jan - Bronsveld, P.C.P. - Rath, J.K. - Schropp, R.E.I.
    C-AFM and X-TEM: studies of mixed-phase silicon thin films.
    [C-AFM a X-TEM: zkoumání heterostrukturních tenkých vrstev křemíku.]
    G.I.T. Imaging and Microscopy. Roč. 10, č. 1 (2008), s. 30-32. ISSN 1439-4243
    R&D Projects: GA MŠMT(CZ) LC06040; GA MŽP(CZ) SN/3/172/05; GA ČR(CZ) GD202/05/H003; GA AV ČR IAA1010316; GA MŠMT LC510; GA AV ČR IAA1010413
    Institutional research plan: CEZ:AV0Z10100521
    Keywords : conductive atomic force microscopy * cross-sectional transmission electron microscopy * silicon thin films
    Subject RIV: BM - Solid Matter Physics ; Magnetism

    Thin intrinsic silicon films containing microcrystalline grains embedded in amorphous tissue were studied by two complementary microscopy techniques.

    Tenké intrinsické vrstvy křemíku obsahující mikrokrystalická zrna zabudovaná do amorfní matrice byly studovány dvěma doplňujícími se mikroskopickými technikami.
    Permanent Link: http://hdl.handle.net/11104/0160655

     
     
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