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Formation of excited Ag atoms in sputtering of silver

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    0304154 - URE-Y 20030094 RIV US eng J - Journal Article
    Šroubek, Zdeněk - Šroubek, Filip - Wucher, A. - Yarmoff, J. A.
    Formation of excited Ag atoms in sputtering of silver.
    Physical Review B. Roč. 68, č. 11 (2003), s. 1154261-1154265. ISSN 0163-1829
    R&D Projects: GA MŠMT ME 469; GA MŠMT ME 328
    Institutional research plan: CEZ:AV0Z2067918
    Keywords : ionisation * collision processes * sputtering
    Subject RIV: BM - Solid Matter Physics ; Magnetism
    Impact factor: 2.962, year: 2003

    A model is presented of the formation of escited Ag.sup.*.sup. (4d.sup.9 .sup.5s.sup.2.sup.) atoms during sputtering of Ag metal by energetic Ar.sup.+.sup. ions. The essential part of the formation process is the slow diffusion of 4d-holes in the collision cascade from the sites of violet Ag-Ag collisions to the emitted Ag atoms. Computer simulation of Ag cascades and of the 4d-hole trasnport allows us to quantify the model and to describe all characteristic features of the available experimental data, in particular the fact that the sputtered Ag.sup.*.sup. atoms exhibit a narrower kinetic energy distribution than those ejected in the electronic ground state.
    Permanent Link: http://hdl.handle.net/11104/0114295
     

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