Advances in imaging and electron physics Vol. 128

0205712 - UPT-D 20030095 RIV US eng M - Monography Chapter
Müllerová, Ilona - Frank, Luděk
Scanning low energy electron microscopy.
Advances in imaging and electron physics Vol. 128. New York: Elesevier Science, 2003 - (Hawkes, P.), s. 309 - 443
Institutional research plan: CEZ:AV0Z2065902
Keywords : scanning electron microscope * low energy SEM * low energy electron beams
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

Extensive review deals with principles of the scanning low energy electron microscopy in all important aspects starting from motivations to lower energy of electrons impinging on the specimen, including problems of interaction of slow electrons with the matter, emission yields, electron optical problems of formation low energy electron beams, detection issues, and general as well as specific questions of the instrumentation, and finishing with presentation of selected application results demonstrating capabilities of this microscopic mode.
Permanent Link: http://hdl.handle.net/11104/0101325