3D Construction View of Differential Pumping Chamber with Detector Board of Environmental Scanning Electron Microscope

0205675 - UPT-D 20030057 CZ eng K - Conference Paper (Czech conference)
Neděla, Vilém
3D Construction View of Differential Pumping Chamber with Detector Board of Environmental Scanning Electron Microscope.
4. ročník přehlídky doktorských prací Elektrotechnika a informatika 2003. Plzeň: Západočeská univerzita v Plzni, 2003, s. 96 - 99. ISBN 80-7082-993-1.
[Elektrotechnika a informatika 2003. Nečtiny (CZ), 15.10.2003-16.10.2003]
R&D Projects: GA ČR GA102/01/1271; GA AV ČR IBS2065107
Institutional research plan: CEZ:AV0Z2065902
Keywords : 3D view * detector board * ESEM
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

This paper deals with construction of the differential pumping chamber with a detector board for adaptation of the scanning electron microscope (SEM) to the environmental scanning electron microscope (ESEM). ESEM allows work at higher pressure in some parts of the microscope. It focuses especially on the 3D construction view of the differential pumping chamber together with the detector board of the differential pumping chamber and it comments reasons of necessity of the assembly of these parts into the environmental scanning electron microscope.
Permanent Link: http://hdl.handle.net/11104/0101288