Scanning electron microscopy with low energy electrons

0205668 - UPT-D 20030050 RIV CZ eng K - Conference Paper (Czech conference)
Mika, Filip
Scanning electron microscopy with low energy electrons.
Proceedings of the 9th Conference and Competition Student EEICT 2003 - Papers written by postgraduate students. Brno: Brno University of Technology, 2003 - (Řezáč, D.; Zacios, D.), s. 485 - 489. ISBN 80-214-2379-X.
[STUDENT EEICT 2003. Brno (CZ), 24.04.2003]
R&D Projects: GA AV ČR KJB2065301
Institutional research plan: CEZ:AV0Z2065902
Keywords : scanning electron microscopy * critical energy * nonconductors
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

A method of scanning electron microscopy (SEM) of nonconductive specimens, based on measurement and utilisation of the critical energy of electron impact, is described in detail together with examples of its applications. The critical energy, at which the total electron yield curve crosses the unit level, is estimated on the base of measurement of the time development in the image signal from beginning of irradiation. The method is programmed and implemented as a module to the controlling software of the microscope type VEGA, where it secures fast search for the critical energy value.
Permanent Link: http://hdl.handle.net/11104/0101281