Detection of backscattered electrons in environmental scanning electron microscope

0205650 - UPT-D 20030032 RIV HR eng C - Conference Paper (international conference)
Autrata, Rudolf - Jirák, Josef - Wandrol, Petr - Špinka, Jiří
Detection of backscattered electrons in environmental scanning electron microscope.
Proceedings of the 6th Multinational Congress on Microscopy - European Extension. Zagreb: Croatian Society for Electron Microscopy, 2003 - (Milat, O.; Ježek, D.), s. 489 - 490
[MCEM. Pula (HR), 01.06.2003-05.06.2003]
R&D Projects: GA ČR GA102/01/1271
Institutional research plan: CEZ:AV0Z2065902
Keywords : collection angle * signal level * detector
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

Impact of primary electrons causes generation of signals in the environmental scanning electron microscope (ESEM). These signals can be subsequently detected. Secondary and backscattered electrons are very often used to obtain information about the specimen. In ESEM secondary electrons are mostly detected by a ionisation detector, while backscattered electrons are detected by a scintillation detector.
Permanent Link: http://hdl.handle.net/11104/0101263