Comparison of imaging with SE ionization and BSE scintillation detector in ESEM

0205649 - UPT-D 20030031 RIV HR eng C - Conference Paper (international conference)
Autrata, Rudolf - Neděla, Vilém - Horký, D. - Schauer, Petr
Comparison of imaging with SE ionization and BSE scintillation detector in ESEM.
Proceedings of the 6th Multinational Congress on Microscopy - European Extension. Zagreb: Croatian Society for Electron Microscopy, 2003 - (Milat, O.; Ježek, D.), s. 487 - 488
[MCEM. Pula (HR), 01.06.2003-05.06.2003]
R&D Projects: GA ČR GA102/01/1271
Institutional research plan: CEZ:AV0Z2065902
Keywords : ionisation detector * scintillation detector * environmental microscope
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

Environmental scanning electron microscopy (ESEM) or low-vacuum scanning electron microscopy (LV SEM) enables the visualisation of samples in a gaseous environment at the pressure of the specimen chamber from 1 Pa to over 1000 Pa. Detection of signal electrons, namely secondary electrons (SEs) cannot be realised in a gaseous environment of the specimen chamber in the same way as for the high vacuum SEM, because high voltage of the Everhart-Thornley detector is not compatible with the conductance of the low vacuum environment [1]. For this reason, gaseous ions which are ionised by SEs from the specimen are used for the detection in ESEM. For the detection of the backscattered electrons (BSEs), conventional scintillation detector is the best to use.
Permanent Link: http://hdl.handle.net/11104/0101262