Backscattered electron imaging using the improved YAG scintillation detector

0205648 - UPT-D 20030030 RIV HR eng C - Conference Paper (international conference)
Autrata, Rudolf - Matějková, Jiřina
Backscattered electron imaging using the improved YAG scintillation detector.
Proceedings of the 6th Multinational Congress on Microscopy - European Extension. Zagreb: Croatian Society for Electron Microscopy, 2003 - (Milat, O.; Ježek, D.), s. 450 - 451
[MCEM. Pula (HR), 01.06.2003-05.06.2003]
R&D Projects: GA AV ČR IBS2065107
Institutional research plan: CEZ:AV0Z2065902
Keywords : backscattered electron * scintillator * detector
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

It is known that the E-T scintillation PMT system [1] represents the most efficient detector of signal electrons in the SEM. Today, practically all types of SEMs are standardly equipped with this detector for the detection of secondary electrons (SEs). For backscattered electrons (BSEs) not only scintillation detector but also semiconductor and channel plate detectors are used. The highest detection quantum efficiency (DQE) is achieved with the scintillation detector on the basis of the yttrium aluminium garnet single crystal scintillator (YAG)[2].
Permanent Link: http://hdl.handle.net/11104/0101261