Influence of the gas used on amplification of signals in environmental SEM

0205511 - UPT-D 20020061 RIV CZ eng C - Conference Paper (international conference)
Romanovský, Vladimír - Neděla, Vilém - Autrata, Rudolf
Influence of the gas used on amplification of signals in environmental SEM.
Proceedings of the 8^th international seminar, held in Skalský dvůr. Brno: Ústav přístrojové techniky Akademie věd České republiky, 2002 - (Frank, L.), s. 63 - 64. ISBN 80-238-8986-9.
[Recent trends in charged particle optics and surface physics instrumentation. Skalský dvůr (CZ), 08.07.2002-12.07.2002]
R&D Projects: GA ČR GA102/01/1271
Institutional research plan: CEZ:AV0Z2065902
Keywords : water containing speciments * low pressure
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

Commercially available Environmental and Low Vacuum scanning electron microscopy permits a low pressure of gas in the specimen chamber. These instruments are possible to be used for observing of uncoated nonconductive or pure conductive or water containing specimens without the necessary dryingand using other special preparation techniques. Contemporarily, these microscopes come in use mainly in biology, medicine, as well as in the semiconductor industry.
Permanent Link: http://hdl.handle.net/11104/0101124