Detection of signal electrons at higher pressure in the specimen chamber

0205510 - UPT-D 20020060 RIV CZ eng C - Conference Paper (international conference)
Jirák, Josef - Autrata, Rudolf - Špinka, Jiří
Detection of signal electrons at higher pressure in the specimen chamber.
Proceedings of the 8^th international seminar, held in Skalský dvůr. Brno: Ústav přístrojové techniky Akademie věd České republiky, 2002 - (Frank, L.), s. 55 - 56. ISBN 80-238-8986-9.
[Recent trends in charged particle optics and surface physics instrumentation. Skalský dvůr (CZ), 08.07.2002-12.07.2002]
R&D Projects: GA ČR GA102/01/1271
Institutional research plan: CEZ:AV0Z2065902
Keywords : scanning electron microscopy * higher pressures * surface negative charge
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

The advantages of the scanning electron microscopy working at higher pressures in the specimen chamber are connected with the possibility of observation of specimens structures, which are difficultly observable without previous preparation for microscopes working with pressures in the specimen chamber under 10^-2 Pa. The pressure in the specimen chamber up to approx. 2000 Pa brings the possibility of observation of specimens, which release gases, specimens containing liquid phase, including wet biological preparations, reactions on the phase interfaces, etc. At higher pressures in the specimen chamber it is also not necessary - due to neutralisation of the surface negative charge by gas ions - to coat electrically non-conductive specimens by a conductive layer.
Permanent Link: http://hdl.handle.net/11104/0101123