X-ray microanalysis in ESEM and LV SEM

0205509 - UPT-D 20020059 RIV CZ eng C - Conference Paper (international conference)
Autrata, Rudolf - Jirák, Josef - Špinka, Jiří
X-ray microanalysis in ESEM and LV SEM.
Proceedings of the 8^th international seminar, held in Skalský dvůr. Brno: Ústav přístrojové techniky Akademie věd České republiky, 2002 - (Frank, L.), s. 51 - 54. ISBN 80-238-8986-9.
[Recent trends in charged particle optics and surface physics instrumentation. Skalský dvůr (CZ), 08.07.2002-12.07.2002]
R&D Projects: GA ČR GA102/01/1271
Institutional research plan: CEZ:AV0Z2065902
Keywords : primary electron * low vacuum * electron microscope
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

The scattering of primary electrons to so-called skirt, appearing in the range of pressures used in regimes of LV SEM (low vacuum) as well as in ESEM, has no substantial influence on the spatial resolution for commonly used types of imaging in the scanning electron microscope. It demonstrates itself just as a higher share of the noise signal. What is more, it brings known substantial advantages, as that no preparation of modification of non-conductive samples is needed and observation of liquid phase containing specimens is made possible.
Permanent Link: http://hdl.handle.net/11104/0101122