Combined detector for BSE, SE and BSE+SE detection in a low voltage SEM

0205508 - UPT-D 20020058 RIV CZ eng C - Conference Paper (international conference)
Autrata, Rudolf - Jirák, Josef - Romanovský, Vladimír - Špinka, Jiří
Combined detector for BSE, SE and BSE+SE detection in a low voltage SEM.
Proceedings of the 8^th international seminar, held in Skalský dvůr. Brno: Ústav přístrojové techniky Akademie věd České republiky, 2002 - (Frank, L.), s. 49 - 50. ISBN 80-238-8986-9.
[Recent trends in charged particle optics and surface physics instrumentation. Skalský dvůr (CZ), 08.07.2002-12.07.2002]
R&D Projects: GA ČR GA102/01/1271
Institutional research plan: CEZ:AV0Z2065902
Keywords : low accelerating voltage * electrons beam * Everhart-Thornley
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

Specimen observation at a low accelerating voltage of the electron beam (around 1kV) is a new and attractive technique of scanning electron microscopy. While detection to the signal of secondary electrons (SE) with the help of the scintillation-photomultiplier system described by Everhart-Thornley does not depend on the primary beam energy, the detection of backscattered electrons (BSE), having their energy only a bit lower than energy of the beam, is limited by a low sensitivity of semiconductor or channel plate detectors to channel plate detectors to electrons of energy below 2 keV.
Permanent Link: http://hdl.handle.net/11104/0101121