Influence of Primary Electron Energy on Signal Detection in Environmental Conditions

0205412 - UPT-D 20010052 RIV IT eng C - Conference Paper (international conference)
Jirák, Josef - Autrata, Rudolf - Schneider, L.
Influence of Primary Electron Energy on Signal Detection in Environmental Conditions.
Proceedings of 5th Multinational Congress on Electron Microscopy. Lecce: Rinton Press, 2001 - (Dini, L.; Catalano, M.), s. 525-526. ISBN 1-58949-003-7.
[MCEM '01 /5./ - Multinational Congress on Electron Microscopy. Lecce (IT), 20.09.2001-25.09.2001]
R&D Projects: GA ČR GA102/01/1271
Institutional research plan: CEZ:AV0Z2065902
Keywords : ionization and scintillation detectors * backscattered electrons
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

Ionization and scintillation detectors can be used for detection of signal electrons in the scanning electron microscope working in environmental conditions. At ionization detector signal of secondary and backscattered electrons is amplified at the process of impact ionization in the gas environment in the specimen chamber [1], scintillation detector detects only backscattered electrons. In our experiments we use a special detection system which for the detection of backscattered electrons exploits single crystal of yttrium aluminium garnet doped with Ce as a scintillator.
Permanent Link: http://hdl.handle.net/11104/0101026