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Advances in SEM Instrumentation
- 1.0205403 - UPT-D 20010043 RIV IT eng C - Conference Paper (international conference)
Frank, Luděk - Müllerová, Ilona
Advances in SEM Instrumentation.
Proceedings of 5th Multinational Congress on Electron Microscopy. Lecce: Rinton Press, 2001 - (Dini, L.; Catalano, M.), s. 503-514. ISBN 1-58949-003-7.
[MCEM '01 /5./ - Multinational Congress on Electron Microscopy. Lecce (IT), 20.09.2001-25.09.2001]
R&D Projects: GA ČR GA202/99/0008
Institutional research plan: CEZ:AV0Z2065902
Keywords : Termoemission (TE) cathode * permanent magnet lenses
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
The classical Scanning Electron Microscope seems to have achieved its limits behind which, at least for a near future, hardly any space is available for further improvements. "Classical" means here a microscope with the thermoemission (TE) cathode and constant energy of the primary electron beam throughout the column, adjustable within the range of 1 to 30 keV. CAD tools enabled the manufacrurers to upgrade to resolution to 3 or 3.5 nm at 25 or 30keV, which is not likely to be significantly updated within the conception mentioned.
Permanent Link: http://hdl.handle.net/11104/0101017
Number of the records: 1