0205270 - UPT-D 20000049 RIV CZ eng C - Conference Paper (international conference)
Zobačová, Jitka - Müllerová, Ilona - Hutař, Otakar - Frank, Luděk
Measurement of the critical energy in the SEM equipped with the cathode lens.
Proceedings EMAS 2000 - 4th Regional Workshop on Electron Probe Microanalysis Today - Practical Aspects. Prague: Czech Technical University in Prague, Faculty of Mechanical Engineering, 2000 - (Starý, V.; Horák, K.; Voňková, V.), s. 209. ISBN 80-01-02176-9.
[EMAS 2000 - Regional Workshop on Electron Probe Microanalysis Today /4./. Třešť (CZ), 17.05.2000-20.05.2000]
R&D Projects: GA ČR GA202/99/0008
Institutional research plan: CEZ:AV0Z2065902
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

Charge absorbed in a specimen during observation in SEM is a result of unbalance between incoming and emitted electrons. In a nonconductive specimen, the charge remains localized and the electric field influences the trajectories of both the primary beam and the signal electrons moving toward a detctor so that the geometry as well as the intensity scale of the image are damaged. Among the methods invented to avoid the surface charging, imaging at critical energies belongs to the most progressive ones.
Permanent Link: http://hdl.handle.net/11104/0100888