Number of the records: 1
Electronic Devices and Systems 1999 - Proceedings
- 1.0205205 - UPT-D 990110 CZ cze M - Monography Chapter
Matějka, František
Elektronová litografie na Ústavu mikroelektroniky na konci tisíciletí.
[Electron lithography at the Institute of Microelectronics at the end of the millenium.]
Electronic Devices and Systems 1999 - Proceedings. Brno: Technical University Brno, 1999 - (Musil, M.), s. 160-166. ISBN 80-214-1466-9
R&D Projects: GA ČR GA102/97/1145
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0100825
Number of the records: 1