Surface characterisation of tin oxide thin films for gas sensors prepared by plasma oxidation

0185883 - UJF-V 20033190 RIV SK eng C - Conference Paper (international conference)
Strýhal, Z. - Pavlík, J. - Macková, Anna - Peřina, Vratislav
Surface characterisation of tin oxide thin films for gas sensors prepared by plasma oxidation.
Proceedings of Symposium on Application of Plasma Processes. 2003, s. 144-145. ISBN 80-8040-195-0.
[Symposium on Application of Plasma Processes. Liptovský Mikuláš (SK), 13.01.2003-18.01.2003]
Institutional research plan: CEZ:AV0Z1048901
Keywords : tin oxide films * plasma oxidation * AFM
Subject RIV: BM - Solid Matter Physics ; Magnetism

We presented the combined study of plasma deposited tin oxide films by AFM and RBS. The stoichiometry of prepared layers and trace elements, impurities were evaluated from RBS spectra and the topography was deduced from AFM measurement. We observed the dependence between the composition of the film prepared, the roughness and plasma deposition parameters.
Permanent Link: http://hdl.handle.net/11104/0082234