Degradation of polyimide by 100 keV He+, Ne+, Ar+ and Kr+ ions

0185322 - UJF-V 20010049 RIV NL eng J - Journal Article
Hnatowicz, Vladimír - Peřina, Vratislav - Macková, Anna - Švorčík, V. - Rybka, V. - Fink, V. - Heitz, J.
Degradation of polyimide by 100 keV He+, Ne+, Ar+ and Kr+ ions.
Nuclear Instruments & Methods in Physics Research Section B. Roč. 175, - (2001), s. 437-441. ISSN 0168-583X. E-ISSN 1872-9584
R&D Projects: GA ČR GA203/99/1626; GA AV ČR IAA7011908; GA AV ČR KSK1010104
Subject RIV: BG - Nuclear, Atomic and Molecular Physics, Colliders
Impact factor: 1.041, year: 2001

50 mum thick polyimide (Kapton, PI) foils were irradiated with 100 keV He+, Ne+, Ar+ and Kr+ ions to fluences from 1 x 10(12) to 1 x 10(16) cm(-2), and the structural and compositional changes in the polymer surface layer, degraded by the ion bombardment, were studied by RES and ERDA techniques. The sheet resistance at room temperature was also measured. Significant hydrogen and oxygen depletion is observed for the ion fluences above 1 x 10(14) cm(-2) in the PIsurface layer, the thickness of which is an increasing function of the ion projected range. Measured H and O depth profiles are structureless with the concentration monotonically increasing from the sample surface to the sample bulk where it achieves the value typical for pristine PI. The sheet resistance remains unchanged up to the fluence of 10(14)cm(-2) and then it declines rapidly by several orders of magnitude, the decline being more pronounced for heavier ions.
Permanent Link: http://hdl.handle.net/11104/0081722