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Optical Emission Spectroscopy of CN.sub.x./sub. Plasma Species in Hybrid Pulsed Laser Deposition System

  1. 1.
    0181311 - UFCH-W 20010234 RIV CZ eng J - Journal Article
    Novotný, Michal - Bulíř, Jiří - Jelínek, Miroslav - Lančok, Ján - Zelinger, Zdeněk
    Optical Emission Spectroscopy of CNx Plasma Species in Hybrid Pulsed Laser Deposition System.
    Jemná mechanika a optika. Roč. 46, 11/12 (2001), s. 371-373. ISSN 0447-6441
    R&D Projects: GA AV ČR IAA1010110
    Institutional research plan: CEZ:AV0Z4040901
    Keywords : optical emission spectroscopy * pulsed laser deposition * CNx plasma species
    Subject RIV: CF - Physical ; Theoretical Chemistry
    Permanent Link: http://hdl.handle.net/11104/0077893
     

Number of the records: 1  

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