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IR Laser Decomposition of Tetravinylsilane for Deposition of SixC1-x coatings

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    0164790 - UCHP-M 950112 US eng A - Abstract
    Dřínek, Vladislav - Bastl, Zdeněk - Šubrt, Jan - Urbanová, Markéta - Pola, Josef
    IR Laser Decomposition of Tetravinylsilane for Deposition of SixC1-x coatings.
    ROMOPTO '94 Conference in Optics. Proceedings Series SPIE. Bellingham: SPIE, 1995 - (Vlad, V.). s. 163-165. ISBN 0-8194-1813-7.
    [Conference in Optics ROMOPTO /4./. 00.00.1994, Bellingham]
    Permanent Link: http://hdl.handle.net/11104/0061995

     
     

Number of the records: 1  

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