Oxidation of graphite-like carbon films with different microhardness and density

0134379 - FZU-D 20030277 RIV NL eng J - Journal Article
Kulikovsky, V. - Boháč, Petr - Vorlíček, Vladimír - Deineka, Alexander - Chvostová, Dagmar - Kurdyumov, A. - Jastrabík, Lubomír
Oxidation of graphite-like carbon films with different microhardness and density.
Surface and Coatings Technology. 174-175, - (2003), s. 290-295. ISSN 0257-8972
R&D Projects: GA MŠMT LN00A015; GA ČR GA202/02/0216
Institutional research plan: CEZ:AV0Z1010914
Keywords : a-C film * microhardness * thermal stability
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 1.410, year: 2003

Evolution of microhardness, internal stress and thickness of three types of carbon(a-C) films(#1-3) with different microhardness (H=60, 24, and 20 GPa) and density after annealing in air for 1 h temperatures of 100, 200, 300, 350 and 400^o C was investigated. The film obtained has a graphite-like structure and its composition corresponds approximately to formula CO_0.15-CO_0.18.
Permanent Link: http://hdl.handle.net/11104/0032283