0134358 - FZU-D 20030256 RIV NL eng J - Journal Article
Mišina, Martin - Pokorný, Petr
Energy and composition of the ion flux in microwave electron cyclotron resonance/radio frequency methan plasma.
Surface and Coatings Technology. 173-174, - (2003), s. 914-917. ISSN 0257-8972.
[International Conference on Plasma Surface Engineering/11./. Garmisch-Partenkirchen, 09.09.2002-13.09.2002]
R&D Projects: GA MŠMT ME 455; GA ČR GA106/99/D086
Grant - others:NATO(XX) SfP974354
Institutional research plan: CEZ:AV0Z1010914
Keywords : mass spectrometry * ion energy * methane * PE CVD
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 1.410, year: 2003

The microwave electron cyclotron resonance/r.f. discharge in methane/argon working gas has been studied by a means of energy resolved ion mass spectrometry.The ion energy distribution and composition of the ion flux at a substrate was measured for microwave power ranging from 50 to 600 W, r.f. biases from 0 to -200 V and total pressure from 0.05 to 1 Pa.
Permanent Link: http://hdl.handle.net/11104/0032263