0134355 - FZU-D 20030253 RIV IT eng C - Conference Paper (international conference)
Popov, C. - Jelínek, Miroslav - Bulíř, Jiří - Kulich, W.
Microwave plasma chemical vapour deposition of nanocrystalline diamond films.
Proceedings of International Symposium on Plasma Chemistry /16./. Roma: xx, 2003, s. ISPC-014-1 - ISPC-014-5.
[International Symposium on Plasma Chemistry /16./. Taormina (IT), 22.06.2003-27.06.2003]
Institutional research plan: CEZ:AV0Z1010914
Keywords : nanocrystalline diamond films * microwave plasma chemical vapour deposition
Subject RIV: BM - Solid Matter Physics ; Magnetism

Nanocrystalline diamond films have been prepared by microwave plasma chemical vapour deposition from methan/nitrogen mixtures and the influence of the gas phase composition on the properties of the deposited films was investigated.
Permanent Link: http://hdl.handle.net/11104/0032260