Number of the records: 1
Study of plasma processes during pulsed laser ablation of graphite target in nitrogen
- 1.0134350 - FZU-D 20030248 RIV NL eng J - Journal Article
Bulíř, Jiří - Novotný, Michal - Jelínek, Miroslav - Jastrabík, Lubomír - Zelinger, Zdeněk
Study of plasma processes during pulsed laser ablation of graphite target in nitrogen.
Surface and Coatings Technology. 173-174, - (2003), s. 968-972. ISSN 0257-8972
R&D Projects: GA AV ČR IAA1010110; GA ČR GP106/02/P015; GA MŠMT LN00A015
Institutional research plan: CEZ:AV0Z4040901; CEZ:AV0Z1010914
Keywords : plasma processes * laser deposition * emission spectroscopy
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 1.410, year: 2003
Plasma processes during CNx films deposition were studied in a pulsed laser deposition system equipped with a KrF excimer laser (500mJ, 20ns). We report on an optical emission spectroscopy, which was used for a spatial and time resolved investigation of the plasma species. Analysis includes estimation of vibrational and rotational temperatures of the CN molecule.
Permanent Link: http://hdl.handle.net/11104/0032255
Number of the records: 1