Thermal stability of microhardness and internal stress of hard a-C films with predominantly sp 2 bonds

0134345 - FZU-D 20030243 RIV CH eng J - Journal Article
Kulykovskyy, Valeriy - Vorlíček, Vladimír - Boháč, Petr - Kurdyumov, A. - Deineka, Alexander - Jastrabík, Lubomír
Thermal stability of microhardness and internal stress of hard a-C films with predominantly sp 2 bonds.
Diamond and Related Materials. Roč. 12, - (2003), s. 1378-1384. ISSN 0925-9635. E-ISSN 1879-0062
R&D Projects: GA MŠMT LN00A015; GA ČR GA202/02/0216
Institutional research plan: CEZ:AV0Z1010914
Keywords : diamond-like carbon * sputtering * mechanical properties
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 1.867, year: 2003

Annealing in vacuum at temperatures up to 820 o C, microhardness, internal stress, electron diffraction, Raman and optical spectra of three sets of films with different initial microhardness were compared. Both the high internal stress and the specific film nanostricture are responsible for the high microhardness of these sp 2 -bonded films.
Permanent Link: http://hdl.handle.net/11104/0032250