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X-ray emission from thin films on a substrate - Calculation and experiments

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    0134314 - FZU-D 20030210 RIV AT eng J - Journal Article
    Starý, V. - Jurek, Karel
    X-ray emission from thin films on a substrate - Calculation and experiments.
    Microchimica Acta. Roč. 139, - (2002), s. 179-184. ISSN 0026-3672. E-ISSN 1436-5073
    Institutional research plan: CEZ:AV0Z1010914; CEZ:MSM 210000021
    Keywords : Monte Carlo simulation * electron microanalysis * X-ray emission * thin films
    Subject RIV: BM - Solid Matter Physics ; Magnetism
    Impact factor: 1.050, year: 2001

    In Monte Carlo code the single crystal scattering model is employed for simulation of X-ray emission from thin films of Au on the Si substrate. The electron beam energy was in the range 10-30keV. These data were compared with experimental values of k-ratios calculated from X-ray intensities of Au M and Au L characteristic lines.
    Permanent Link: http://hdl.handle.net/11104/0032222


     
     

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