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Role of grains in protocrystalline silicon layers grown at very low substrate temperatures and studied by atomic force microscopy
- 1.0134047 - FZU-D 20020335 RIV NL eng J - Journal Article
Mates, Tomáš - Fejfar, Antonín - Drbohlav, Ivo - Rezek, Bohuslav - Fojtík, Petr - Luterová, Kateřina - Kočka, Jan - Koch, C. - Schubert, M. B. - Ito, M. - Ro, K. - Uyama, H.
Role of grains in protocrystalline silicon layers grown at very low substrate temperatures and studied by atomic force microscopy.
Journal of Non-Crystalline Solids. 299-302, - (2002), s. 767-771. ISSN 0022-3093. E-ISSN 1873-4812
Institutional research plan: CEZ:AV0Z1010914
Keywords : protocrystalline silicon layers * atomic force microscopy
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 1.435, year: 2002
Role of the sample thickness and silane dilution on the structure and electronic properties of protocrystalline silicon thin films deposited at very low substrate temperatures was investigated.
Permanent Link: http://hdl.handle.net/11104/0031988
Number of the records: 1