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Characterization of RF-spittered self-polarized PZT thin films for sensors arrays
- 1.0134011 - FZU-D 20020299 RIV GB eng J - Journal Article
Suchaneck, G. - Lin, W. M. - Koehler, R. - Sandner, T. - Gerlach, G. - Krawietz, R. - Pompe, W. - Deineka, Alexander - Jastrabík, Lubomír
Characterization of RF-spittered self-polarized PZT thin films for sensors arrays.
Vacuum. Roč. 66, - (2002), s. 473-478. ISSN 0042-207X. E-ISSN 1879-2715
R&D Projects: GA MŠMT LN00A015; GA ČR GA202/00/1425
Institutional research plan: CEZ:AV0Z1010914
Keywords : self-polarized PZT * polarization and refractive index profiles * IR sensor array
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 0.723, year: 2002
In this work, a complex investigation of film composition, microstructure and physical properties of RF-sputtered self-polarized PZT thin filůms for IR sensor arrays was carried out. IR-radiation detector detectivity and noise equivalent temperature difference were calculated.
Permanent Link: http://hdl.handle.net/11104/0031952
Number of the records: 1