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Elastic electron backscattering from silicon surfaces: effect of surface roughness

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    0133882 - FZU-D 20020165 RIV GB eng J - Journal Article
    Zemek, Josef - Jiříček, Petr - Jablonski, A. - Lesiak, B.
    Elastic electron backscattering from silicon surfaces: effect of surface roughness.
    Surface and Interface Analysis. Roč. 34, - (2002), s. 215-219. ISSN 0142-2421. E-ISSN 1096-9918
    Grant - others:KBN(PL) Project 15/30
    Institutional research plan: CEZ:AV0Z1010914
    Keywords : electron elastic backscattering intensity * elastic peak electron spectroscopy * EPES
    Subject RIV: BM - Solid Matter Physics ; Magnetism
    Impact factor: 1.071, year: 2002

    In the present work, systematic study has been carried out on the influence of surface roughness on the electron IMFPs determined by the EPES method using a Cu standard.
    Permanent Link: http://hdl.handle.net/11104/0031832

     
     

Number of the records: 1  

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