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Study of RF discharge properties for hybrid pulsed laser deposition
- 1.0133469 - FZU-D 20010321 RIV CZ eng K - Conference Paper (Czech conference)
Novotný, M. - Jelínek, Miroslav - Bulíř, Jiří - Zelinger, Zdeněk - Lančok, Ján
Study of RF discharge properties for hybrid pulsed laser deposition.
Proceedings of Workshop 2001. Vol. A. Praha: Czech Technical University, 2001, s. 114-115. CTU reports., 5.
[Workshop 2001. Praha (CZ), 00.02.2001]
R&D Projects: GA AV ČR IAA1010110; GA MŠMT LN00A015
Institutional research plan: CEZ:AV0Z1010914
Keywords : CN2 * pulsed laser deposition * activation of nitrogen
Subject RIV: BM - Solid Matter Physics ; Magnetism
We have created CNx layers by pulsed laser deposition (PLD) using graphite target in N2 ambient and KrF excimer laser. We have found that active nitrogen plays an important role in this task. We have studied the influence of various RF parameters on the activation of nitrogen by optical emission spectroscopy.
Permanent Link: http://hdl.handle.net/11104/0031434
Number of the records: 1