0133329 - FZU-D 20010124 RIV CZ eng J - Journal Article
Bulíř, Jiří - Jelínek, Miroslav - Lančok, Ján - Zambov, L. M. - Popov, C. - Plass, M. F. - Bock, A. - Masseli, K. - Kulisch, W.
CN_x films and sensors.
Jemná mechanika a optika. Roč. 45, 11-12 (2000), s. 334-335. ISSN 0447-6441
R&D Projects: GA MŠMT LN00A015
Institutional research plan: CEZ:AV0Z1010914
Keywords : carbon nitride films * deposition process * r.f. discharge
Subject RIV: BM - Solid Matter Physics ; Magnetism

We observed that the level of the additional ion bombardment could significiantly influence the film (CNx) porosity.An ability of those films for usage for humidity sensors has been proved.

Permanent Link: http://hdl.handle.net/11104/0031304