Number of the records: 1
Laser deposition of CN.sub.x./sub. films combined with RF and hollow cathode discharges
- 1.0132811 - FZU-D 20000063 RIV MX eng J - Journal Article
Jelínek, Miroslav - Lančok, Ján - Jastrabík, Lubomír - Soukup, Ladislav - Šimečková, Marta - Zelinger, Z.
Laser deposition of CNx films combined with RF and hollow cathode discharges.
Superficies y Vacio. Roč. 9, - (1999), s. 303-305
R&D Projects: GA ČR GA202/93/0464
Institutional research plan: CEZ:AV0Z1010914
Subject RIV: BM - Solid Matter Physics ; Magnetism
Pulsed laser deposition combined with additional RF and hollow cathod discharges for deposition of CNx films are studied. Films were characterized by WDX, XRD and by microhardness testers.
Permanent Link: http://hdl.handle.net/11104/0030809
Number of the records: 1