Number of the records: 1  

Low-pressure magnetron sputtering

  1. 1.
    0132322 - FZU-D 990265 RIV GB eng J - Journal Article
    Musil, Jindřich
    Low-pressure magnetron sputtering.
    Vacuum. Roč. 50, 3-4 (1998), s. 363-372. ISSN 0042-207X. E-ISSN 1879-2715.
    [Joint Vacuum Conference of Hungary, Austria, Slovenia and Croatia /7./. Debrecen, 26.05.1997-29.05.1997]
    R&D Projects: GA ČR GV106/96/K245
    Subject RIV: BM - Solid Matter Physics ; Magnetism
    Impact factor: 0.474, year: 1998
    Permanent Link: http://hdl.handle.net/11104/0030353

     
     

Number of the records: 1  

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