Number of the records: 1
The interaction of the supersonic plasma - jet with substrate in the RF plasma-chemical reactor
- 1.0131012 - FZU-D 960367 RIV DE eng J - Journal Article
Šícha, M. - Hubička, Z. - Tichý, M. - Novák, Miloš - Soukup, Ladislav - Jastrabík, Lubomír - Behnke, J. F. - Kapička, V. - Kapoun, K. - Šerý, M.
The interaction of the supersonic plasma - jet with substrate in the RF plasma-chemical reactor.
Contributions to Plasma Physics. Roč. 36, č. 5 (1996), s. 605-611. ISSN 0863-1042. E-ISSN 1521-3986
R&D Projects: GA AV ČR 0659
Impact factor: 0.846, year: 1996
Permanent Link: http://hdl.handle.net/11104/0029107
Number of the records: 1