Advances in SEM Methodology and Instrumentation

0109067 - UPT-D 20040070 RIV JP eng C - Conference Paper (international conference)
Frank, Luděk
Advances in SEM Methodology and Instrumentation.
[Pokroky v metodologii a instrumentaci pro rastrovací elektronovou mikroskopii.]
Proceedings of the 8th Asia-Pacific Conference on Electron Microscopy. Kanazawa: 8APEM Publication Committee, 2004, s. 40-41. ISBN 4-9902106-0-3.
[APEM /8./ Asia-Pacific Conference on Electron Microscopy. Kanazawa (JP), 07.06.2004-11.06.2004]
R&D Projects: GA ČR GA202/04/0281
Keywords : SEM * methodology * instrumentation
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

The present status in development of methodology and instrumentation for the scanning electron microscopy is briefly reviewed

Je podán stručný přehled současného stavu vývoje metodologie a přístrojové techniky pro rastrovací elektronovou mikroskopii
Permanent Link: http://hdl.handle.net/11104/0016179