Influence of the substrate temperature on the properties of nanocrystalline diamond/amorphous carbon composite films

0039889 - FZÚ 2007 RIV CH eng J - Journal Article
Kulisch, W. - Popov, C. - Boycheva, S. - Jelínek, Miroslav - Gibson, P. N. - Vorlíček, Vladimír
Influence of the substrate temperature on the properties of nanocrystalline diamond/amorphous carbon composite films.
[Vliv teploty podložky na vlastmosti nanokrystalického/amorfního uhlíkového kompositního filmu.]
Surface and Coatings Technology. Roč. 200, - (2006), s. 4731-4736. ISSN 0257-8972
R&D Projects: GA AV ČR(CZ) IAA1010110
Grant - others:Marie Curie EIF - 6th EC Framework Programme(XE) MEIF-CT-2004-500038
Institutional research plan: CEZ:AV0Z1010914
Keywords : nanocrystalline diamond * microwave plasma CVD * growth rate
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 1.559, year: 2006

Nanocrystalline diamond/amorphous carbon (NCD/a-C) composite films have been deposited by microwave plasma chemical vapour deposition from CH₄/N₂ mixtures. They consist of diamond nanocrystals of 3-5 nm grain size, embedded in an amorphous matrix with thickness of 1-1.5 nm. The matrix is mainly sp³ bonded, with about 20-30% sp² material, and contains 10% hydrogen in the form of sp³ CH_x unity

Nanokrystalický diamanat/amorfní uhlíková (NCD/a-C)kompositní vrstva byla připravena technikou mikrovlnného CVD. Rozměr diamantových nanokrystalů byl 3-5 nm. Matrice obsahovala převážně sp³ vazby a asi 20-30% vazeb sp²
Permanent Link: http://hdl.handle.net/11104/0133801