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0584772 - ÚPT 2024 CZ eng A - Abstract
Košelová, Zuzana - Horáková, L. - Allaham, Mohammad M. - Burda, Daniel - Knápek, Alexandr - Fohlerová, Z.
Cleaning of tungsten tips for subsequent cold field emission application.
IMAPS Flash Conference. 9th International Microelectronics Assembly and Packaging Society Flash Conference. Extended abstracts. Brno: Brno University of Technology, FEEC, 2023 - (Otáhal, A.; Szendiuch, I.; Skácel, J.). s. 50-51. ISBN 978-80-214-6185-7.
[IMAPS Flash Conference 2023. International Microelectronics Assembly and Packaging Society Flash Conference /9./. 26.10.2023-27.10.2023, Brno]
Research Infrastructure: CzechNanoLab - 90110
Institutional support: RVO:68081731
Keywords : Cleaning * Cold field emission * Tungsten tips * Macroetching * Hydrofluoric acid
OECD category: Electrical and electronic engineering
Permanent Link: https://hdl.handle.net/11104/0352620