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0580457 - ÚPT 2024 RIV CZ cze V - Research Report
Mikel, Břetislav
SMV-2023-61: Odměřovací systémy pro litografy.
[SMV-2023-61: Measuring systems for lithographers.]
Brno: Raith GmbH, 2023. 3 s.
Source of funding: N - Non-public resources
Keywords : laser source * measurement of lenght * laser interferometry
OECD category: Electrical and electronic engineering
Permanent Link: https://hdl.handle.net/11104/0349225