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0574651 - FZÚ 2024 RIV US eng J - Journal Article
Antunes, V.G. - Rudolph, M. - Kapran, Anna - Hajihoseini, H. - Raadu, M.A. - Brenning, N. - Gudmundsson, J.T. - Lundin, D. - Minea, T.
Influence of the magnetic field on the extension of the ionization region in high power impulse magnetron sputtering discharges.
Plasma Sources Science & Technology. Roč. 32, č. 7 (2023), č. článku 075016. ISSN 0963-0252. E-ISSN 1361-6595
Institutional support: RVO:68378271
Keywords : magnetron sputtering * HiPIMS * ionization region * magnetic field * optical emission spectroscopy
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 3.8, year: 2022
Method of publishing: Limited access
https://doi.org/10.1088/1361-6595/ace847
Permanent Link: https://hdl.handle.net/11104/0349495