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    1.
    0570843 US BXXS
    Kling, R. (ed.) - Watanabe, A. (ed.) - Pfleging, W. (ed.)
    Laser-based Micro- and Nanoprocessing XVII.
    Bellingham: SPIE, 2023. Proceedings of SPIE. ISSN 0277-786X
     
     

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