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0570231 - FZÚ 2024 RIV US eng J - Journal Article
Lambert, Nicolas - Sung, Kil-dong - Mortet, Vincent
Optical emission spectroscopy analysis of microwave plasma-enhanced chemical vapor deposition systems dynamic gas response.
Physica Status Solidi A. Roč. 220, č. 4 (2023), č. článku 2200322. ISSN 1862-6300. E-ISSN 1862-6319
R&D Projects: GA MŠMT(CZ) EF16_019/0000760; GA ČR(CZ) GA21-03538S
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : diamond growth * dynamic gas response * microwave plasma-enhanced chemical vapor deposition (MWPECVD) * optical emission spectroscopy (OES)
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 2, year: 2022
Method of publishing: Limited access
https://doi.org/10.1002/pssa.202200322
Permanent Link: https://hdl.handle.net/11104/0349378