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0567629 - ÚPT 2023 CZ eng A - Abstract
Podstránský, Jáchym - Drozd, Michal - Knápek, Alexandr
Automated defectoscopy of thin poly(methyl methacrylate) layers.
IMAPS Flash Conference, 8th International Microelectronics Assembly and Packaging Society Flash Conference. Extended abstracts. Brno: Brno University of Technology, 2022 - (Otáhal, A.; Szendiuch, I.; Skácel, J.). s. 41-42. ISBN 978-80-214-6111-6.
[IMAPS Flash Conference 2022. International Microelectronics Assembly and Packaging Society Flash Conference /8./. 26.10.2022-27.10.2022, Brno]
Institutional support: RVO:68081731
Keywords : defects in resist * rtificial intelligence * image processing * automatization
OECD category: Automation and control systems
Permanent Link: https://hdl.handle.net/11104/0338861