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0567284 - ÚPT 2023 RIV CZ eng J - Journal Article
Podstránský, Jáchym - Knápek, Alexandr
Automated defectoscopy of thin poly (methyl methacrylate) layers.
Electroscope. Roč. 2022, č. 1 (2022), č. článku 8. ISSN 1802-4564
Institutional support: RVO:68081731
Keywords : defects in resist * artificial intelligence * image processing * automatization
OECD category: Automation and control systems
Method of publishing: Open access
http://147.228.94.30/images/PDF/Rocnik2020/Cislo1_2022/r16c1c7.pdf
Permanent Link: https://hdl.handle.net/11104/0338550