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0567078 - FZÚ 2024 RIV US eng J - Journal Article
Kapran, Anna - Antunes, V.G. - Hubička, Zdeněk - Ballage, C. - Minea, T.
Investigation of the magnetron balancing effect on the ionized flux fraction and deposition rate of sputtered titanium species for the high-power impulse magnetron sputtering pulses of different lengths.
Journal of Vacuum Science & Technology A : Vacuum, Surfaces and Films. Roč. 41, č. 1 (2023), č. článku 013003. ISSN 0734-2101. E-ISSN 1520-8559
R&D Projects: GA ČR(CZ) GA21-04477S; GA MŠMT(CZ) EF16_019/0000760
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : HiPIMS * magnetron * ionized flux fraction * unbalanced magnetic field
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 2.9, year: 2022
Method of publishing: Limited access
https://doi.org/10.1116/6.0002309
Permanent Link: https://hdl.handle.net/11104/0342037