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0564978 - FZÚ 2023 RIV US eng C - Conference Paper (international conference)
Zehetner, J. - Vanko, G. - Izsák, T. - Kováčová, E. - Držík, M. - Dohnal, F. - Kromka, Alexander
Diamond cantilevers for MEMS sensor applications fabricated by laser ablation and optimized etching techniques.
Proceedings of the 14th International Conference on Advanced Semiconductor Devices And Microsystems. New York: IEEE, 2022 - (Marek, J.; Donoval, D.; Vavrinsky, E.), s. 195-198. ISBN 978-1-6654-6977-7.
[International Conference on Advanced Semiconductor Devices And Microsystems - (ASDAM) /14./. Smolenice (SK), 23.10.2022-26.10.2022]
R&D Projects: GA MŠMT(CZ) 8X20035
Institutional support: RVO:68378271
Keywords : laser processing * MEMS * cantilevers * diamond
OECD category: Mechanical engineering
Permanent Link: https://hdl.handle.net/11104/0336554