0559035 - FZÚ 2023 RIV SK eng C - Conference Paper (international conference)
Zehetner, J. - Vanko, G. - Dohnal, F. - Izsák, T. - Držík, M. - Kromka, AlexanderRecent challenges in micromachining of wide-bandgap materials and fabrication of MEMS for harsh environments.
Proceedings of ADEPT - ADEPT 2022. Žilina: University of Žilina, 2022 - (Feiler, M.; Ziman, M.; Kováčová, S.; Kováč, jr., J.), s. 7-12. ISBN 978-80-554-1884-1.
[10th International Conference on Advances in Electronic and Photonic Technologies - ADEPT 2022. Tatranská Lomnica (SK), 20.06.2022-24.06.2022]
R&D Projects: GA MŠMT(CZ) 8X20035
Institutional support: RVO:68378271
Keywords : harsh environment * diamond * SiC * MEMS * HEMT * laser ablation
OECD category: Materials engineering
Permanent Link: https://hdl.handle.net/11104/0332450
