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0558649 - FZÚ 2023 RIV CH eng J - Journal Article
Marton, M. - Vojs, M. - Michniak, P. - Behúl, M. - Řeháček, V. - Pifko, M. - Stehlík, Štěpán - Kromka, Alexander
New chemical pathway for large-area deposition of doped diamond films by linear antenna microwave plasma chemical vapor deposition.
Diamond and Related Materials. Roč. 126, June (2022), č. článku 109111. ISSN 0925-9635. E-ISSN 1879-0062
R&D Projects: GA MŠMT(CZ) EF16_019/0000760; GA MŠMT LM2018110
Grant - others:AV ČR(CZ) CSIR-21-04; OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Program: Bilaterální spolupráce
Institutional support: RVO:68378271
Keywords : boron doped diamond * large area deposition * trimethyl borate * linear antenna microwave CVD
OECD category: Materials engineering
Impact factor: 4.1, year: 2022
Method of publishing: Limited access
https://doi.org/10.1016/j.diamond.2022.109111
Permanent Link: https://hdl.handle.net/11104/0336677