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0552303 - FZÚ 2022 RIV US eng J - Journal Article
Hippler, Rainer - Čada, Martin - Hubička, Zdeněk
Direct current and high power impulse magnetron sputtering discharges with a positively biased anode.
Journal of Vacuum Science & Technology A : Vacuum, Surfaces and Films. Roč. 39, č. 4 (2021), č. článku 043007. ISSN 0734-2101. E-ISSN 1520-8559
R&D Projects: GA MŠMT(CZ) EF16_019/0000760; GA MPO FV20580; GA ČR GA19-00579S
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : magnetron * mass spectrometry * Langmuir probe * anode bias * HiPIMS
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 3.234, year: 2021
Method of publishing: Open access
Permanent Link: http://hdl.handle.net/11104/0327435