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0551708 - ÚPT 2022 RIV CZ cze O - Others
Brunn, Ondřej - Burda, Daniel - Kolařík, Vladimír - Kopal, Jaroslav
Skleněná maska se sub mikronovými otvory.
[Glass mask with sub micron pinholes.]
2021
R&D Projects: GA TA ČR(CZ) TN01000008
Institutional support: RVO:68081731
Keywords : pinhole * mask * electron lithography
OECD category: Nano-processes (applications on nano-scale)
Permanent Link: http://hdl.handle.net/11104/0326939